PackageType Size:5”6”&8”Barewafers.
Thickness:6mils(Thinwafers)to8.5mils&above
(Thickwafers).
CompactFootprint
1300(L)X1000(W)X1,990(H)mm.(.(InclIncl TowerTower Lamp)Lamp)
Input/Output Media
Canister,Jar, WackerBox,Cassette.
Cassette,Canister,Jar,Wacker Box.
• PCControl
– MultiTaskingandThreading.
– HighLevelLanguage.– HighLevelLanguage.
• PCMMI(Man-MachineInterface)
– OperatingSystembasedonWindows2000.
– GraphicalInterfacewithMenuandIcondriven.
– PasswordAccessManagement.
• SingleLCDMonitordisplay
– MachineDataDisplay.
• SPC(StatisticalProcessControl)
– Yield,UPH,Recipe,MTBA,LotInformation&
JamStatistics.
• SECS/GEM(Option) – RS232orEthernet.