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ACCRETECH (Tokyo Seimitsu)
| Machine Function |
Wafer Laser Dicing Machine
for 200mm wafer |
Click here for more details
|
| Model Name |
ML200 |
| Dimensions |
L |
x |
W |
x |
H |
| mm |
1,290 |
x |
1,520 |
x |
1,900 |
| inches |
51 |
x |
60 |
x |
75 |
| Weight (kg / lbs) |
1,600 |
3,527 |
|
| Facilities |
|
| Electrical VAC |
200/220/240/380/415Vac |
| Phase |
3 phase |
| Hertz |
50 to 60 Hz |
| KVA Rating |
4.0 Kva max |
| Air CDA |
|
| (kg/cm2 : psi) |
5.10 |
75.52 |
|
| liters/min : gpm |
|
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| Vacuum |
|
| (kg/cm2 : psi) |
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|
| liters/min : gpm |
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|
| N2 |
|
| (kg/cm2 : psi) |
5.10 |
75.52 |
|
| liters/min : gpm |
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| City Water |
|
| (kg/cm2 : psi) |
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| liters/min : gpm |
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|
| temp, C |
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| DI Water |
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| (kg/cm2 : psi) |
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| liters/min : gpm |
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|
| temp, C |
|
| Machine Function |
Wafer Laser Dicing Machine
for 300mm wafer |
Click here for more details
|
| Model Name |
ML300 |
| Dimensions |
L |
x |
W |
x |
H |
| mm |
1,630 |
x |
1,641 |
x |
1,986 |
| inches |
64 |
x |
65 |
x |
78 |
| Weight (kg / lbs) |
1,900 |
4,189 |
|
| Facilities |
|
| Electrical VAC |
200/220/240/380/415 Vac |
| Phase |
3 phase |
| Hertz |
50 to 60 Hz |
| KVA Rating |
4.0 K va max |
| Air CDA |
|
| (kg/cm2 : psi) |
5.10 |
75.52 |
|
| liters/min : gpm |
|
|
|
| Vacuum |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| N2 |
|
| (kg/cm2 : psi) |
5.10 |
75.52 |
|
| liters/min : gpm |
|
|
|
| City Water |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| temp, C |
|
| DI Water |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| temp, C |
|
|
|
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|