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ACCRETECH (Tokyo Seimitsu)
| Machine Function |
Wafer Backgrind and Polish
Grinding Machine, 200mm wafer. |
Click here for more details
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| Model Name |
PG200 |
| Dimensions |
L |
x |
W |
x |
H |
| mm |
2,918 |
x |
1,600 |
x |
2,000 |
| inches |
115 |
x |
63 |
x |
79 |
| Weight (kg / lbs) |
5,000 |
11,023 |
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| Facilities |
|
| Electrical VAC |
200Vac |
| Phase |
3 phase |
| Hertz |
50-60 Hz |
| KVA Rating |
25kVa |
| Air CDA |
|
| (kg/cm2 : psi) |
0.0352 to 0.0492 |
0.5 to 0.7 |
|
| liters/min : gpm |
200L / min |
|
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| Vacuum |
|
| (kg/cm2 : psi) |
0.0141 to 0.0211 |
0.2 to 0.3 |
|
| liters/min : gpm |
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| N2 |
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| (kg/cm2 : psi) |
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| liters/min : gpm |
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| City Water |
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| (kg/cm2 : psi) |
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| liters/min : gpm |
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| temp, C |
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| DI Water |
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| (kg/cm2 : psi) |
0.0141 to 0.0352 |
0.2 to 0.5 |
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| liters/min : gpm |
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| temp, C |
20 to 25 deg Celsius |
| Machine Function |
Wafer Backgrind and Polish
Grinding Machine, 300mm wafer. |
Click here for more details
|
| Model Name |
PG300 |
| Dimensions |
L |
x |
W |
x |
H |
| mm |
3,459 |
x |
1,750 |
x |
2,100 |
| inches |
136 |
x |
69 |
x |
83 |
| Weight (kg / lbs) |
7,000 |
15,432 |
|
| Facilities |
|
| Electrical VAC |
200Vac |
| Phase |
3 phase |
| Hertz |
50 to 60 Hz |
| KVA Rating |
25 kVa |
| Air CDA |
|
| (kg/cm2 : psi) |
0.0352 to 0.0492 |
0.5 to 0.7 |
|
| liters/min : gpm |
180L / min |
|
|
| Vacuum |
|
| (kg/cm2 : psi) |
0.0141 to 0.0211 |
0.2 to 0.3 |
|
| liters/min : gpm |
|
|
|
| N2 |
|
| (kg/cm2 : psi) |
0.0352 to 0.0492 |
0.5 to 0.7 |
|
| liters/min : gpm |
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|
|
| City Water |
|
| (kg/cm2 : psi) |
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|
|
| liters/min : gpm |
|
|
|
| temp, C |
|
| DI Water |
|
| (kg/cm2 : psi) |
0.0141 to 0.0352 |
0.2 to 0.5 |
|
| liters/min : gpm |
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| temp, C |
20 to 25 deg celsius |
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