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ACCRETECH (Tokyo Seimitsu)
| Machine Function |
Wafer Prober |
Click here for more details
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| Model Name |
UF-3000EX |
| Dimensions |
L |
x |
W |
x |
H |
| mm |
1,487 |
x |
1,622 |
x |
1,423 |
| inches |
|
x |
|
x |
|
| Weight (kg / lbs) |
1,650 |
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| Facilities |
|
| Electrical VAC |
200VAC |
| Phase |
3 |
| Hertz |
50-/60 |
| KVA Rating |
3 |
| Air CDA |
|
| (kg/cm2 : psi) |
0.6 - 0.99 Mpa |
|
|
| liters/min : gpm |
0.1L / min |
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| Vacuum |
|
| (kg/cm2 : psi) |
'-53 - -100 kPa |
0.001 |
|
| liters/min : gpm |
30L / min |
|
|
| N2 |
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| (kg/cm2 : psi) |
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| liters/min : gpm |
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| City Water |
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| (kg/cm2 : psi) |
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| liters/min : gpm |
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| temp, C |
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| DI Water |
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| (kg/cm2 : psi) |
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| liters/min : gpm |
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| temp, C |
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| Machine Function |
Wafer Prober |
Click here for more details
|
| Model Name |
UF-2000 |
| Dimensions |
L |
x |
W |
x |
H |
| mm |
1,487 |
x |
1,622 |
x |
1,423 |
| inches |
|
x |
|
x |
|
| Weight (kg / lbs) |
1,650 |
|
|
| Facilities |
|
| Electrical VAC |
200VAC |
| Phase |
3 |
| Hertz |
50-/60 |
| KVA Rating |
3 |
| Air CDA |
|
| (kg/cm2 : psi) |
0.6 - 0.99 Mpa |
|
|
| liters/min : gpm |
0.1L / min |
|
|
| Vacuum |
|
| (kg/cm2 : psi) |
'-53 - -100 kPa |
0.001 |
|
| liters/min : gpm |
30L / min |
|
|
| N2 |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| City Water |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| temp, C |
|
| DI Water |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| temp, C |
|
|
|
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|